Condition optimization, reliability evaluation of SiO2–SiO2 HF bonding and its application for UV detection micro flow cell
- 10 May 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 83 (1-3) , 136-141
- https://doi.org/10.1016/s0924-4247(00)00301-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Micro-fabrication and analytical performances of quartz and glass microchips for electrophoresis.BUNSEKI KAGAKU, 1998
- Microfabricated Chips for Capillary Electrophoresis on Quartz Glass Substrates Using a Bonding with Hydrofluoric AcidPublished by Springer Nature ,1998
- Silicon fusion bonding for fabrication of sensors, actuators and microstructuresSensors and Actuators A: Physical, 1990