Protectiveness of CVD Al2O3 Films on TiN against High-Temperature Oxidation
- 1 January 1990
- journal article
- Published by Japan Institute of Metals in Materials Transactions, JIM
- Vol. 31 (5) , 396-403
- https://doi.org/10.2320/matertrans1989.31.396
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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