Resonance and steep fronts effects in nanosecond dry laser cleaning
- 1 September 2002
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 197-198, 904-910
- https://doi.org/10.1016/s0169-4332(02)00453-1
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Dynamic particle removal by nanosecond dry laser cleaning: theoryPublished by SPIE-Intl Soc Optical Eng ,2002
- New mechanism of laser dry cleaningPublished by SPIE-Intl Soc Optical Eng ,2001
- Thermomechanical mechanisms of laser cleaningPublished by SPIE-Intl Soc Optical Eng ,2000
- Laser Processing and ChemistryPublished by Springer Nature ,2000
- Surface acceleration during dry laser cleaning of siliconApplied Physics A, 1999
- An energy approach to the modelling of particle removal by pulsed laser irradiationApplied Physics A, 1999
- Laser-assisted removal of particles on silicon wafersJournal of Applied Physics, 1999
- A theoretical model for laser removal of particles from solid surfacesApplied Physics A, 1997
- Efficient pulsed laser removal of 0.2 μm sized particles from a solid surfaceApplied Physics Letters, 1991