Ion and neutral temperatures in electron cyclotron resonance plasma reactors
- 4 February 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (5) , 458-460
- https://doi.org/10.1063/1.104606
Abstract
Ion and neutral temperatures are measured by high-resolution laser-induced fluorescence spectroscopy both in the source and downstream of an electron cyclotron resonance discharge through mixtures of Ar, Ar/Ne, and Ar/He. Contrary to previous reports, both ions and neutrals are found to be cold. In the source, ion temperatures perpendicular to the magnetic field are ≤0.5 eV; downstream they are ∼0.25 eV. Neutral temperatures in the source and downstream are 0.068 and 0.030 eV, respectively.Keywords
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