Relations between the parameters of thin film Al-Al2O3-metal capacitors
- 1 March 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 66 (2) , L15-L18
- https://doi.org/10.1016/0040-6090(80)90231-x
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- An SiO2-Ta2O5Thin Film CapacitorIEEE Transactions on Parts, Hybrids, and Packaging, 1973
- The Correlation Between Temperature Coefficient of Capacitance and Dielectric Loss in Tantalum and Tantalum-Aluminum Anodic OxidesJournal of the Electrochemical Society, 1972
- Selection of thin film capacitor dielectricsThin Solid Films, 1968
- Dielectric properties of thin films of aluminium oxide and silicon oxideThin Solid Films, 1968