High resolution depth profiling of nitrogen in A1N layers

This publication has 13 references indexed in Scilit:

• Temperature and dose dependences of nitrogen implantation into iron
  Materials Science and Engineering: B, 1989
• Comparison between diffusion of 15N N and 14N in implanted iron
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
• Temperature influence during high-fluence nitrogen ion implantation into iron
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
• Mössbauer and nuclear reaction spectroscopy study of XC06 and 100C6 nitrogen implanted steels at various temperatures
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
• Very high resolution profiling of nitrogen by the 14N(α, γ)18F reaction
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Nuclear microprobe analysis of wear tracks on 14N-implanted steels
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Adhesive, abrasive and oxidative wear in ion-implanted metals
  Materials Science and Engineering, 1985
• High resolution depth profiling of F, Ne and Na in materials
  Nuclear Instruments and Methods in Physics Research, 1983
• A new measurement of the 429 keV 15N(p,αγ)12C resonance. Applications of the very narrow width fouNd to 15N and 1H depth location: I. Resonance width measurement
  Nuclear Instruments and Methods in Physics Research, 1983
• A simple, digitally controlled, automatic, hysteresis free, high precision energy scanning system for Van de Graaff type accelerators: Part I: Principle, results and applications
  Nuclear Instruments and Methods in Physics Research, 1983