Improvement of beam properties by optimizing ion optics and minimizing beam interactions
- 1 February 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 64 (1-4) , 378-382
- https://doi.org/10.1016/0168-583x(92)95499-h
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Practical optimization of multielectrode lensesJournal of Vacuum Science & Technology B, 1989
- Practical optimization of electrostatic lensesJournal of Vacuum Science & Technology B, 1989