High-speed metal-semiconductor-metal photodiodes with Er-doped GaAs
- 1 March 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 16 (3) , 106-108
- https://doi.org/10.1109/55.363239
Abstract
Very high-speed MSM photodiodes have been fabricated on Er-doped GaAs over a doping range of 10/sup 18/-10/sup 20/ cm/sup -3/. The impulse response (characterized by photoconductive sampling) of these diodes, with finger widths/spacings of 2 /spl mu/m, has been found to be tunable over a range of about 3 ps-22 ps. Electro-optic sampling was used to characterize MSM diodes with finger widths/spacings of 0.5 /spl mu/m and 1 /spl mu/m on a sample with [Er]=10/sup 19/ cm/sup -3/, resulting in 3-dB bandwidths of 160 GHz and 140 GHz, respectively, corresponding to pulse widths of 2.7 ps and 3.3 ps. Correlation measurements were also done on the GaAs:Er samples, using an all-electronic Sampling Optical Temporal Analyzer (SOTA) structure.Keywords
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