Epitaxial Growth of Ba2YCu3Ox Thin Film on Epitaxial ZrO2/Si(100)

Abstract
High-T c superconducting Ba2YCu3O x films have been epitaxially grown on tetragonal ZrO2/Si(100) substrate by rf magnetron sputtering below 700°C. The slowly-cooled sample after deposition in a chamber involving O2 gas exhibits the superconducting transition above liquid nitrogen temperature. T c(onset) and T c(end) observed are 88 K and 82 K, respectively.