Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 85-88
- https://doi.org/10.1109/sensor.1997.613588
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Micromachined 1x2 Optical Fiber SwitchPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A quantitative analysis of Scratch Drive Actuator using buckling motionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Optical crossconnection by silicon micromachined torsion mirrorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Vertical mirrors fabricated by reactive ion etching for fiber optical switching applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Thermal microactuators for surface-micromachining processesPublished by SPIE-Intl Soc Optical Eng ,1995
- Realization of FDDI optical bypass switches using surface micromachining technologyPublished by SPIE-Intl Soc Optical Eng ,1995
- Micro-machined three-dimensional micro-optics for integrated free-space optical systemIEEE Photonics Technology Letters, 1994
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- A silicon-based moving-mirror optical switchJournal of Lightwave Technology, 1992