Dynamics of polysilicon parallel-plate electrostatic actuators
- 1 March 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 52 (1-3) , 216-220
- https://doi.org/10.1016/0924-4247(96)80152-x
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Microfabricated hingesSensors and Actuators A: Physical, 1992