Theory of the growth of SiO2 in an oxygen plasma
- 31 December 1983
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 26 (12) , 1167-1172
- https://doi.org/10.1016/0038-1101(83)90144-2
Abstract
No abstract availableKeywords
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- Electrolytic conduction of a solid insulator at high fields The formation of the anodic oxide film on aluminiumPhysica, 1935