Silicon Oxidation in an Oxygen Plasma Excited by Microwaves
- 1 September 1965
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 36 (9) , 2703-2707
- https://doi.org/10.1063/1.1714565
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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- Ion bombardment of metal surfacesVacuum, 1961
- Stabilization of Silicon Surfaces by Thermally Grown Oxides*Bell System Technical Journal, 1959
- A Floating Double Probe Method for Measurements in Gas DischargesPhysical Review B, 1950