X‐Ray Lithography and X‐Ray Microscopy
Open Access
- 1 December 1976
- journal article
- research article
- Published by Wiley in Physikalische Blätter
- Vol. 32 (12) , 564-571
- https://doi.org/10.1002/phbl.19760321210
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
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- Proximity effect in electron-beam lithographyJournal of Vacuum Science and Technology, 1975
- High-speed low-power x-ray lithographyApplied Physics Letters, 1974
- Microcircuits by Electron BeamScientific American, 1972
- High-resolution pattern replication using soft X raysElectronics Letters, 1972
- Electron Microscopic Enlargements of X-Ray Absorption MicrographsPublished by Elsevier ,1963
- High-Resolution MicroradiographyScience, 1956