A thermodynamic approach to chemical vapor deposition of boron nitride thin films from borazine
- 1 April 1997
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 113-114, 638-641
- https://doi.org/10.1016/s0169-4332(96)00816-1
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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