High-Rate Thermal Plasma CVD of SiC
- 1 July 1988
- journal article
- Published by Wiley in Advanced Ceramic Materials
- Vol. 3 (4) , 423-426
- https://doi.org/10.1111/j.1551-2916.1988.tb00250.x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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