Reactively sputtered indium tin oxide polycrystalline thin films as NO and NO2 gas sensors
- 1 May 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 186 (2) , 349-360
- https://doi.org/10.1016/0040-6090(90)90150-c
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensorsSensors and Actuators, 1988
- Anomalous temperature dependence of the electrical conductivity of zinc oxide thin filmsSurface Science, 1986
- Effect of CH4, SO2 and NO on the CO response of an SnO2-based thick film gas sensor in combustion gasesSensors and Actuators, 1985
- The effect of oxygen on the electrical conductivity of some metal oxides in inert and reducing atmospheres at high temperatureSensors and Actuators, 1985
- A highly sensitive NO2 sensor based on electrical conductivity changes in phthalocyanine filmsSensors and Actuators, 1984
- Semiconductor gas sensorsSensors and Actuators, 1981
- Homogeneous semiconducting gas sensorsSensors and Actuators, 1981
- Oxygen chemisorption on tin oxide: Correlation between electrical conductivity and EPR measurementsJournal of Vacuum Science and Technology, 1980
- Thin-film semiconductor NOxsensorIEEE Transactions on Electron Devices, 1979
- Optical properties of r.f. reactive sputtered tin-doped In2O3 filmsThin Solid Films, 1979