Surface characterization by spectroscopic infrared ellipsometry
- 1 January 1993
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 346 (1) , 358-361
- https://doi.org/10.1007/bf00321450
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Problem of polarization degree in spectroscopic photometric ellipsometry (polarimetry)Journal of the Optical Society of America A, 1992
- Characterization of thin oxide-n itride double layers on silicon wafers by IR ellipsometryPhysica Status Solidi (a), 1992
- Total Reflection Prisms as Achromatic IR RetardersApplied Spectroscopy, 1988
- Infrared Absorption at Longitudinal Optic Frequency in Cubic Crystal FilmsPhysical Review B, 1963