Trends in Electromechanical Transduction
- 1 July 1998
- journal article
- Published by AIP Publishing in Physics Today
- Vol. 51 (7) , 28-34
- https://doi.org/10.1063/1.882325
Abstract
In today's world, it is nearly impossible to avoid contact with electromechanical sensors and actuators over the course of the day, although we rarely recognize them. They drive the keyless entry systems, the light switches that respond to sound or motion, the detectors in cars that determine whether seat belts are fastened and the sound-receiving and sound-generating parts of the telephone, to name just a few examples.Keywords
This publication has 4 references indexed in Scilit:
- Continuous-membrane surface-micromachined silicon deformable mirrorOptical Engineering, 1997
- Why mechanical design cannot be like VLSI designResearch in Engineering Design, 1996
- Modeling of piezoelectric ceramic vibrators including thermal effects. Part I. Thermodynamic property considerationsThe Journal of the Acoustical Society of America, 1995
- Fabrication of silicon condenser microphones using single wafer technologyJournal of Microelectromechanical Systems, 1992