Structural properties of amorphous SiC films and x-ray membranes by EXAFS
- 1 March 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 17 (1-4) , 215-218
- https://doi.org/10.1016/0167-9317(92)90044-r
Abstract
No abstract availableKeywords
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