Electrical Characteristics of Sputter-Ion Pumps
- 15 March 1967
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 38 (4) , 1936-1940
- https://doi.org/10.1063/1.1709785
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Field Enhancing Projections Produced by the Application of an Electric FieldJournal of Applied Physics, 1965
- On the mechanism of the Penning dischargeBritish Journal of Applied Physics, 1964
- Secondary Positive Ion Emission from a Tantalum SurfaceJournal of Applied Physics, 1964
- Sputtering Yields at Very Low Bombarding Ion EnergiesJournal of Applied Physics, 1962
- Electronic Ultra-High Vacuum PumpReview of Scientific Instruments, 1958