Crystallographic Characterization of ZnSxSe1-x Epitaxial Films

Abstract
Crystalline quality of ZnS x Se1-x films grown on GaAs substrates has been investigated in detail using the X-ray double-crystal method. Respective fluctuations in orientation and spacing of lattice planes are measured separately. It is shown that the crystalline quality of ZnS x Se1-x films is noticeably affected by the fluctuation in orientation caused by lattice mismatch and partly by the fluctuation in spacing which may be associated with an inhomogeneous distribution of Se and S atoms. Improvement of the quality by lattice matching is due to a reduction of fluctuation in orientation.