Effect of oxygen on the sputtering of aluminium targets bombarded with argon ions
- 31 August 1973
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Physics
- Vol. 12 (1) , 93-99
- https://doi.org/10.1016/0020-7381(73)80090-7
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- The validity of the transparency model for single crystal sputteringNuclear Instruments and Methods, 1965
- Angular dependent sputtering of copper single crystals by 20 keV noble gas ionsPhysica, 1964