Stable and unstable growth in molecular beam epitaxy
- 3 January 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 72 (1) , 116-119
- https://doi.org/10.1103/physrevlett.72.116
Abstract
We consider the growth of films by molecular beam epitaxy in the presence of step-edge (Schwoebel) barriers using numerical simulation and experiments. We show that the growth of a singular surface is unstable, but that a miscut above a certain critical slope (which depends on growth conditions) leads to stable growth in a step-flow mode. For singular surfaces the instability gives rise to the formation of large mounded structures on the surface for which the slope is in the stable regime. We identify these in GaAs epitaxy using atomic force and scanning tunneling microscopy. We propose a continuum equation which exhibits these features.Keywords
This publication has 19 references indexed in Scilit:
- Homoepitaxial growth of iron and a real space view of reflection-high-energy-electron diffractionPhysical Review Letters, 1993
- Scanning tunneling microscopy observation of self-affine fractal roughness in ion-bombarded film surfacesPhysical Review Letters, 1993
- Measurements of dynamic scaling from epitaxial growth front: Fe film on Fe(001)Physical Review Letters, 1992
- Molecular-beam epitaxial growth and surface diffusionPhysical Review Letters, 1992
- A RHEED Study of Epitaxial Growth of Iron on a Silicon Surface: Experimental Evidence for Kinetic RougheningEurophysics Letters, 1991
- Kinetic growth with surface relaxation: Continuum versus atomistic modelsPhysical Review Letters, 1991
- A new universality class for kinetic growth: One-dimensional molecular-beam epitaxyPhysical Review Letters, 1991
- Continuum models of crystal growth from atomic beams with and without desorptionJournal de Physique I, 1991
- Growth with Surface DiffusionEurophysics Letters, 1990
- Step Motion on Crystal Surfaces. IIJournal of Applied Physics, 1969