Preparation, structure and properties of TaN and TaC films obtained by ion beam assisted deposition
- 1 May 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 127-128, 664-668
- https://doi.org/10.1016/s0168-583x(96)01151-2
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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