Capacitive ultrasonic transducer with net backplate
- 13 July 2000
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 11 (8) , 1119-1125
- https://doi.org/10.1088/0957-0233/11/8/304
Abstract
A study is presented of the function of an air-coupled capacitive ultrasonic transducer with uniform net backplate. Net backplates are an easy, fast-to-assemble alternative to grooved backplates. The frequency responses of the transducers were measured and the resonance frequencies were estimated. A procedure to study the electrostatics of the transducer with net backplate geometry is described with calculations of surface charge density distribution, capacitance and sensitivity.Keywords
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