SiCN nanometric powder produced in square-wave modulated RF glow discharges
- 28 February 1998
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 7 (2-5) , 407-411
- https://doi.org/10.1016/s0925-9635(97)00229-x
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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