Fabrication of a 2D photonic bandgap by a holographicmethod
- 27 February 1997
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 33 (5) , 425-426
- https://doi.org/10.1049/el:19970230
Abstract
The authors present the realisation of a 2D photonic bandgap in gallium arsenide, with a holographic lithography technique. The photonic crystal consists of circular etched air holes on a triangular lattice, and has been obtained with the holographic recording of only three plane waves in a photoresist. The quality of the final structure shows that holographic lithography, which is a low cost method compared with electron beam lithography, has high potential for photonic microstructure fabrication.Keywords
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