Hard antireflecting PECVD silicon nitride coatings on polycrystalline germanium
- 31 March 1997
- journal article
- Published by Elsevier in Infrared Physics & Technology
- Vol. 38 (2) , 83-85
- https://doi.org/10.1016/s1350-4495(96)00033-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Growth and IR-transmission of Sb-doped polycrystalline germaniumSemiconductor Science and Technology, 1992
- Effect of surface damage on the IR optical performance of GeApplied Optics, 1982
- Antireflection Coatings for Germanium and Silicon in the Infrared*Journal of the Optical Society of America, 1958