Real time spectroscopic ellipsometry for characterization of thin film optical properties and microstructural evolution
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 206 (1-2) , 374-380
- https://doi.org/10.1016/0040-6090(91)90454-6
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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