Instrumentation considerations in multichannel ellipsometry for real-time spectroscopy
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 206 (1-2) , 300-305
- https://doi.org/10.1016/0040-6090(91)90439-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Precision Bounds to Ellipsometer SystemsApplied Optics, 1975