Characterization of the fabrication process of Nb/Al$ndash$AlNx/Nb tunnel junctions with low RnA values up to 1 $\Omega$ $\mu$m2
- 3 May 2002
- journal article
- Published by IOP Publishing in Superconductor Science and Technology
- Vol. 15 (6) , 945-951
- https://doi.org/10.1088/0953-2048/15/6/319
Abstract
No abstract availableKeywords
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