Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing
- 1 July 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 247 (2) , 201-207
- https://doi.org/10.1016/0040-6090(94)90800-1
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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