Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering
- 1 January 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 223 (1) , 135-139
- https://doi.org/10.1016/0040-6090(93)90737-a
Abstract
No abstract availableKeywords
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