Ion-assisted selective deposition of aluminium for via-hole interconnections

This publication has 16 references indexed in Scilit:

• Theoretical study of preferential sputtering of isotopic systems at low fluence
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
• Isotopic mass effects in sputtering: Dependence on fluence and emission angle
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
• Preferential sputtering of isotopes: Fluence and emission-angle dependence
  Physical Review Letters, 1989
• Bombardment-induced compositional change with alloys, oxides, oxysalts, and halides
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
• Preferential emission of lighter isotopes in the initial stage of sputtering
  Surface Science, 1988
• Computer simulation of preferential sputtering
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Influence of chemical driving forces in ion mixing of metallic bilayers
  Applied Physics Letters, 1984
• Sputtering of multicomponent materials: Elements of a theory
  Nuclear Instruments and Methods in Physics Research, 1982
• Differential sputtering and surface segregation: The role of enhanced diffusion
  Journal of Vacuum Science and Technology, 1981
• The fractionation of Ca isotopes by sputtering
  Radiation Effects, 1980