Sputtering of multicomponent materials: Elements of a theory
- 15 March 1982
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 194 (1-3) , 541-548
- https://doi.org/10.1016/0029-554x(82)90578-x
Abstract
No abstract availableKeywords
This publication has 26 references indexed in Scilit:
- Theoretical aspects of atomic mixing by ion beamsNuclear Instruments and Methods, 1981
- On the problem of whether mass or chemical bonding is more important to bombardment-induced compositional changes in alloys and oxidesSurface Science, 1980
- On the phenomenological model of preferred sputtering for SIMS and Auger profiling: A critical analysisSurface Science, 1980
- Sputtering of single and multiple component materialsJournal of Vacuum Science and Technology, 1980
- An attempt to understand preferential sputteringNuclear Instruments and Methods, 1978
- Effects of enhanced diffusion on preferred sputtering of homogeneous alloy surfacesSurface Science, 1978
- A model for surface layer composition changes in sputtered alloys and compoundsApplied Physics Letters, 1977
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- The Sputtering of Nickel–Chromium AlloysJournal of Vacuum Science and Technology, 1967