A Morphological Study of Silicon Carbide Prepared by Chemical Vapor Deposition

This publication has 4 references indexed in Scilit:

• The structure of chemical vapor deposited silicon carbide
  Thin Solid Films, 1977
• Epitaxial deposition of silicon carbide from silicon tetrachloride and hexane
  Thin Solid Films, 1976
• Thermodynamic Studies of High Temperature Equilibria. III. SOLGAS, a Computer Program for Calculating the Composition and Heat Condition of an Equilibrium Mixture.
  Acta Chemica Scandinavica, 1971
• The Epitaxial Growth of Silicon Carbide
  Journal of the Electrochemical Society, 1966