Semiconductor fabrication technology applied to micrometer valves
- 1 November 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 36 (11) , 2703-2708
- https://doi.org/10.1109/16.43776
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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