Surface Acoustic Wave Characteristics on ZnO/\mbYZ·LiNbO 3 Structure and Their Application to Elastic Convolver

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Abstract
In an effort to improve the efficiency of an elastic convolver, we discussed ways to increase the electromechanical coupling factor of the LiNbO3 (LN) substrate. We examined, both theoretically and experimentally, the surface acoustic wave (SAW) characteristics of ZnO films formed on the +Y· and -Y·planes of the Y Z·LN substrates. As a result, it was clear that a larger electromechanical coupling factor, k s, can be obtained with a ZnO film on the +Y·plane than on the -Y·plane of Y Z·LN substrates. The maximum value of the coupling factor obtained was 0.32, which was 2.04 times the square (k s 2) of the value obtained without the ZnO film. By applying the LN substrate with the ZnO film on its +Y·plane to the elastic convolver, we obtained a processing time of 7.6 µs, a 3 dB bandwidth of 44 MHz and an efficiency of -58 dBm.