Propagation Characteristics of Surface Acoustic Waves in ZnO/LiNbO3 Structures
- 1 May 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (5S)
- https://doi.org/10.1143/jjap.32.2333
Abstract
In this paper, we report that the propagation characteristics of surface acoustic waves (SAWs) in a structure consisting of a piezoelectric layer on a piezoelectric substrate depend on the relationship between the polarities of the two piezoelectric media. The theoretical analysis of the characteristics of the Rayleigh wave in ZnO/128°-rotated Y-cut LiNbO3 structures shows that there is a large difference in values of electromechanical coupling factor K in the two cases where the ZnO layer is deposited on the positive surface and the negative surface of LiNbO3, and that the value of K 2 can be as high as 13.3%. The mode coupling phenomenon between the Rayleigh and Love waves is also discussed.Keywords
This publication has 3 references indexed in Scilit:
- Theory of interdigital couplers on nonpiezoelectric substratesJournal of Applied Physics, 1973
- Thickness dependence of effective coupling factors of ZnO thin-film surface-wave transducersElectronics Letters, 1973
- Determination of Elastic and Piezoelectric Constants for Crystals in Class (3m)The Journal of the Acoustical Society of America, 1967