Theory of interdigital couplers on nonpiezoelectric substrates
- 1 April 1973
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 44 (4) , 1480-1488
- https://doi.org/10.1063/1.1662397
Abstract
This paper is concerned with the theory of excitation of surface acoustic waves on a nonpiezoelectric material, by using an interdigital electrode structure overlaid with a piezoelectric film. The impedance and capacity of such transducers have been worked out. The results are given in terms of Δv/v, the perturbation in acoustic wave velocity when a perfect conductor is placed in the position of the transducer. A computer program which calculates surface wave propagation on a layered medium consisting of a film on a substrate, with arbitrary elastic and piezoelectric properties for both media, has been used to determine Δv/v, and hence the coupling coefficients and radiation resistance of the interdigital transducer. As a function of piezoelectric film thickness, two peaks in coupling are observed. The results for the interdigital couplers are in quantitative agreement with experiments employing single‐crystal materials. Data for experiments using sputtered piezoelectric films also give qualitative agreement with the theory. If high‐quality crystalline layers are used, the theory suggests that interdigital couplers on nonpiezoelectric delay lines with properties comparable to or better than the present piezoelectric delay lines may be achievable.This publication has 7 references indexed in Scilit:
- Rayleigh-Wave Electromechanical Coupling ConstantsApplied Physics Letters, 1972
- Enhancement of Piezoelectric Surface-Wave Coupling by Thin-Film PerturbationApplied Physics Letters, 1971
- Normal mode theory for acoustic waves and its application to the interdigital transducerIEEE Transactions on Electron Devices, 1971
- A normal mode theory for the Rayleigh wave amplifierIEEE Transactions on Electron Devices, 1971
- Excitation of elastic surface waves by spatial harmonics of interdigital transducersIEEE Transactions on Electron Devices, 1969
- Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit ModelIEEE Transactions on Microwave Theory and Techniques, 1969
- Temperature Dependence of the Electroacoustical Constants of Li-Doped ZnO Single CrystalsThe Journal of the Acoustical Society of America, 1969