Time resolved x-ray diffraction study of laser annealing in silicon at grazing incidence
- 15 October 1989
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (8) , 3523-3525
- https://doi.org/10.1063/1.344109
Abstract
The loss of crystallinity at the surface of a silicon single crystal exposed to intense pulsed laser irradiation has been observed by means of a grazing incidence diffraction technique. The Bragg peak is shown to disappear during melting, and gradually reappear during subsequent stages of recrystallization.This publication has 6 references indexed in Scilit:
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