Laser-Assisted Local Etching of Gallium Arsenide
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Laser chemical etching of vias in GaAsIEEE Electron Device Letters, 1983
- Laser enhanced etching in KOHApplied Physics Letters, 1982
- Laser microphotochemistry for use in solid-state electronicsIEEE Journal of Quantum Electronics, 1980
- Laser-induced chemical vapor deposition of polycrystalline Si from SiCl4Applied Physics Letters, 1980
- Laser-induced microscopic etching of GaAs and InPApplied Physics Letters, 1980
- Variation with Temperature of the Continuous Absorption Spectrum of Diatomic Molecules: Part I. Experimental, The Absorption Spectrum of ChlorinePhysical Review B, 1933