Surface stress model for intrinsic stresses in thin films
- 1 November 2000
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 15 (11) , 2468-2474
- https://doi.org/10.1557/jmr.2000.0354
Abstract
A simple model was presented for intrinsic stress generation in thin films resulting from surface stress effects. This mechanism can explain the origin of compressive stresses often observed during island growth prior to coalescence, as well as intrinsic compressive stresses reported for certain continuous, fully grown films. In some cases, surface stress effects may contribute to a sudden change in the intrinsic stress during island coalescence.Keywords
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