Enhanced Reliability of Native Oxide Free Capacitor Dielectrics on Rapid Thermal Nitrided Polysilicon
- 1 January 1991
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Dielectric breakdown and current conduction of oxide/nitride/oxide multi-layer structuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Compositional Depth Profile of a Native Oxide LPCVD MNOS Structure Using X‐Ray Photoelectron Spectroscopy and Chemical EtchingJournal of the Electrochemical Society, 1983