Determination of Atomic Displacement Modulation in Multi-Layer Structure by X-Ray Diffraction
- 1 January 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (1A) , L62-64
- https://doi.org/10.1143/jjap.24.l62
Abstract
A new method of Fourier analysis is shown by which both concentration and atomic displacement modulations existing in multilayer structures can be reproduced from the measurement of the integrated intensities of satellite reflections. By applying the present method to a molecular beam epitaxy grown (GaAs)8(AlAs)8 superlattice, the atomic displacement modulation in interface region is given as well as concentration modulation.Keywords
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