Micromachined integrated pressure—thermal sensors on flexible substrates

This publication has 18 references indexed in Scilit:

• Microbolometers on a Flexible Substrate for Infrared Detection
  IEEE Sensors Journal, 2004
• Development of polyimide flexible tactile sensor skin
  Journal of Micromechanics and Microengineering, 2003
• Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment
  Thin Solid Films, 2003
• Uncooled infrared microbolometers on a flexible substrate
  IEEE Transactions on Electron Devices, 2002
• Sensitive skin
  IEEE Sensors Journal, 2001
• High electron mobility polycrystalline silicon thin-film transistors on steel foil substrates
  Applied Physics Letters, 1999
• Amorphous silicon transistors on ultrathin steel foil substrates
  Applied Physics Letters, 1999
• Mechanics of rollable and foldable film-on-foil electronics
  Applied Physics Letters, 1999
• Low-cost all-polymer integrated circuits
  Applied Physics Letters, 1998
• Characterization of a surface micromachined pressure sensor array
  Published by SPIE-Intl Soc Optical Eng ,1995