Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment
- 30 January 2003
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 427 (1-2) , 362-366
- https://doi.org/10.1016/s0040-6090(02)01234-8
Abstract
No abstract availableKeywords
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