Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors
- 1 December 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 71 (3) , 161-166
- https://doi.org/10.1016/s0924-4247(98)00178-2
Abstract
No abstract availableKeywords
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