Influence of chemical corrosion on resistivity and 1/f noise of polysilicon gauges
- 1 January 2000
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 40 (1) , 179-183
- https://doi.org/10.1016/s0026-2714(99)00215-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Silicon compatible materials for harsh environment sensorsSensors and Actuators A: Physical, 1999
- noise in polycrystalline silicon thin filmsPhysical Review B, 1998
- Piezoresistance of boron-doped PECVD and LPCVD polycrystalline silicon filmsSensors and Actuators A: Physical, 1995
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990